大型放射光施設 SPring-8

Speaker : Prof. Sven Tougaard

Language : ENGLISH

Affiliate : Department of Physics, Chemistry and Pharmacy, University of Southern Denmark, Denmark

Title : Non-destructive characterization of nano-structures by analysis of the peak shape in photoelectron spectra

Abstract :
 A method for enhanced characterization of nano-structures based on photoelectron emission was developed some time ago[1]. The method relies on analysis of not only the peak intensity but also the distribution of inelastically scattered electrons. It has become increasingly used in the last few years as the technological importance of nano-structures has increased.
 The technique is non-destructive and it is possible to study changes in composition due to e.g. diffusion and chemical reactions as it happens in near-real-time.
 With the high energy photons available at a synchrotron like SPring-8, the analyzed depth is larger than with conventional XPS. This opens up for non-destructive analysis of nano-structures buried at large depths (~100 nm) underneath the sample surface.
 In the talk I will summarize the technique and through practical examples demonstrate its potentials.
 [1]. Sven Tougaard, J. Electron Spectroscopy and Related Phen. 178, 128-153 (2010)

担当者 : 崔　芸涛
PHS : 3758